Coating processes – Electrical product produced – Metal coating
Patent
1997-02-14
1998-02-24
Pianalto, Bernard
Coating processes
Electrical product produced
Metal coating
20419234, 427130, 427131, 427132, 427259, 427264, 427265, 427270, 427272, 427282, 427294, 427404, B05D 512
Patent
active
057210080
ABSTRACT:
A method of fabricating a dual magnetoresistive (DMR) sensor with improved sensor-to-sensor match is disclosed. A first Mo conductor layer and a first NiMn antiferromagnetic layer are formed on top of a first gap layer in wing regions of the DMR sensor. The first NiMn layer is formed on top of the first Mo layer. A first NiFe sensor layer, a first spacer layer and a second NiFe sensor layer are deposited on top of the first NiMn layer in the wing regions and on top of the first gap layer in the active region. The first NiFe sensor layer, the first spacer layer and the second NiFe sensor layer are all deposited in a single vacuum deposition run to minimize material mismatches, and are simultaneously patterned to the desired geometry to minimize misalignment between the two sensor layers. A second conductor layer and a second antiferromagnetic layer are formed on top the second NiFe sensor layer in the wing regions.
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Giusti James
Huang Fujian
Mowry Gregory S.
Pianalto Bernard
Seagate Technology Inc.
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