Method for controlling semiconductor-processing apparatus

Details Method for controlling semiconductor-processing apparatus Method for controlling semiconductor-processing apparatus

2007-08-21

2010-11-09

DeCady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Sequential or selective

C700S121000, C700S020000, C713S400000, C713S600000

Reexamination Certificate

active

07831315

ABSTRACT:
A method controls an apparatus such as a semiconductor-processing apparatus including a controller and at least one device controlled by the controller, wherein the controller is provided with an interface for communicating with the device, and the interface has an internal clock for measuring time intervals for the communication. The method includes: replacing a system clock of the controller's operating system, which is used for transmitting instructions to the interface, with the internal clock of the interface; transmitting instructions to the interface from the controller using the time intervals measured by the internal clock substituting the system clock; and transmitting the instructions to the device from the interface using the time intervals measured by the internal clock in the interface, thereby controlling the device.

REFERENCES:
patent: 5235698 (1993-08-01), Lan
patent: 6128312 (2000-10-01), Kurosawa
patent: 6516422 (2003-02-01), Doblar et al.
patent: 2006/0043202 (2006-03-01), Kim et al.
patent: 2008/0147228 (2008-06-01), Fenner et al.

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