Method for controlling plating rate in an electroless plating sy

Coating processes – Measuring – testing – or indicating

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427 9, 427 10, 427 98, 427345, C23C 1816, C23C 1840

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active

046235540

ABSTRACT:
Method for controlling plating in an electroless plating process. The plating rate is continuously monitored. The plating rate is compared with a set point plating rate. A control voltage is derived proportional to the difference in plating rate and the desired plating rate, the integral of the difference, and the derivative of the difference. The control voltage is applied to a replenishment control for controlling the replenishment rate of a constituent chemical of the plating process.

REFERENCES:
patent: 3951602 (1976-04-01), Thompson
patent: 4055751 (1977-10-01), Bussmann et al.
patent: 4096301 (1978-06-01), Slominski et al.
patent: 4276323 (1981-06-01), Oka et al.
patent: 4320463 (1982-03-01), Himmelstein
patent: 4326940 (1982-04-01), Eckles et al.
patent: 4331699 (1982-05-01), Suzuki et al.
patent: 4344142 (1982-08-01), Diehr, II et al.
patent: 4479980 (1984-10-01), Acosta et al.
Production Methods, Circuits Manuf. (USA), vol. 18, No. 5, May 1978.

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