Coating processes – Measuring – testing – or indicating
Patent
1985-03-08
1986-11-18
Smith, John D.
Coating processes
Measuring, testing, or indicating
427 9, 427 10, 427 98, 427345, C23C 1816, C23C 1840
Patent
active
046235540
ABSTRACT:
Method for controlling plating in an electroless plating process. The plating rate is continuously monitored. The plating rate is compared with a set point plating rate. A control voltage is derived proportional to the difference in plating rate and the desired plating rate, the integral of the difference, and the derivative of the difference. The control voltage is applied to a replenishment control for controlling the replenishment rate of a constituent chemical of the plating process.
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Production Methods, Circuits Manuf. (USA), vol. 18, No. 5, May 1978.
Kaschak Ronald A.
Magnuson Roy H.
Yarmchuk Edward J.
International Business Machines Corp.
Smith John D.
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