Method for controlling plasma surface-treatments with a pluralit

Details Method for controlling plasma surface-treatments with a pluralit Method for controlling plasma surface-treatments with a pluralit

1993-07-02

1994-10-04

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

2504922, G01N 1506

Patent

active

053529022

ABSTRACT:
In conducting a plurality of kinds of surface-treatments on objects to be treated, concentration of produced gases in exhaust gas discharged from a reaction vessel are detected, and data of the detected concentrations are compared with reference data stored in a control unit to continuously control and process the respective surface-treatments. As a result, processing control can be performed suitably for the respective kinds of surface-treatments, and different kinds of surface-treatments can be continuously conducted by one and the same surface-treatment device.

REFERENCES:
patent: 4902934 (1990-02-01), Miyamura et al.
patent: 4945774 (1990-08-01), Beard et al.
An English language abstract of Japanese Laid Open Patent Publication No. 5-47717 to Watanabe, listed above.

Affiliated with

Also associated with

Rating

Method for controlling plasma surface-treatments with a pluralit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for controlling plasma surface-treatments with a pluralit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for controlling plasma surface-treatments with a pluralit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-583307