Method for controlling plasma chemical reactions

Details Method for controlling plasma chemical reactions Method for controlling plasma chemical reactions

1979-03-20

1980-12-30

Edmundson, F. C.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

118724, 204165, 250546, 422111, 422138, 422186, 423659, 427 34, C22D 708, C05D 700, B01J 112, B05D 100

Patent

active

042421888

ABSTRACT:
In a plasma chemical reaction carried out with at least one gas, the plasma constants in the progress of reaction such as electron temperature, electron density and electron energy distribution function can be measured by use of a probe heated to a high temperature which is made of a metal having a small thermionic electron emission at a high temperature. The plasma chemical reaction can be performed in the steady state with satisfactory reproduction of composition, structure, yield and performance of the product by controlling the pressure, input power and gas flow rate in the plasma reactor so that the measured plasma constants always coincide with the predetermined plasma constants necessary for effecting the intended chemical reaction which have been obtained through a preliminary experiment.

REFERENCES:
patent: 2701210 (1955-02-01), Fisher et al.
patent: 3306711 (1967-02-01), Angerhofer
patent: 3728085 (1973-04-01), Horiguchi et al.
patent: 3963443 (1976-06-01), Bond et al.
Langmuir, Gen. Elec. Rev. vol. XXVI, No. 11, pp. 731-735 (1923).
Klagge, Beitraege Plasmaphysik, vol. 15, pp. 309-317 (1975).

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