Fishing – trapping – and vermin destroying
Patent
1991-06-05
1993-03-16
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437233, 437 89, 437186, 437939, 437946, 437952, 148DIG17, 148DIG124, H01L 21265
Patent
active
051943972
ABSTRACT:
A method of controlling the interfacial oxygen concentration of a monocrystalline/polycrystalline emitter includes the steps of: passivating the monocrystalline silicon surface by immersing the wafer in a diluted HF acid solution; transferring the wafer into a high vacuum environment; heating the wafer to between 400.degree. and 700.degree. C.; exposing the monocrystalline silicon surface to a gas having a partial pressure of oxygen of between 10.sup.-5 to 1 Torr for between 1 and 100 minutes; and, depositing polysilicon onto the monocrystalline silicon surface.
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IEEE 1990 Bipolar Circuits and Technology Meeting 1.4, pp. 33-36, "Interface Control in Double Diffused Polysilicon Bipolar Transistors", by J. E. Turner, et al.
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Cook Robert K.
Knepper Ronald W.
Kulkarni Subodh K.
Lange Russell C.
Ronsheim Paul A.
Balconi-Lamica Michael J.
Dang Trung
Hearn Brian E.
International Business Machines - Corporation
Romanchik Richard A.
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