Electric heating – Metal heating – By arc
Patent
1994-04-08
1997-08-12
Evans, Geoffrey S.
Electric heating
Metal heating
By arc
B23K 2602
Patent
active
056561865
ABSTRACT:
In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (F.sub.th) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused to a point at or beneath the surface of a material where laser induced breakdown is desired.
The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.
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Du Detao
Dutta Subrata K.
Elner Victor
Kurtz Ron
Lichter Paul R.
Evans Geoffrey S.
The Regents of the University of Michigan
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