Method for controlling a direction of polarization of a...

Metal working – Piezoelectric device making

Reexamination Certificate

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Details

C029S592100, C029S593000, C029S594000, C029S830000, C029S831000, C029S842000, C310S328000

Reexamination Certificate

active

07024738

ABSTRACT:
To manufacture a compact and high-performance thin-film piezoelectric bimorph element at low cost, first and second piezoelectric thin films (2, 3) are formed by sputtering on the both surfaces of a metal thin plate (1) which are opposing relation to each other along the thickness thereof, while the respective states of polarizations of the first and second piezoelectric thin films (2, 3) are controlled. A pair of electrode films (5) are formed on the respective surfaces of the first and second piezoelectric thin films (2, 3) opposite to the metal thin plate (1).

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