Metal working – Piezoelectric device making
Reexamination Certificate
2006-04-11
2006-04-11
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S592100, C029S593000, C029S594000, C029S830000, C029S831000, C029S842000, C310S328000
Reexamination Certificate
active
07024738
ABSTRACT:
To manufacture a compact and high-performance thin-film piezoelectric bimorph element at low cost, first and second piezoelectric thin films (2, 3) are formed by sputtering on the both surfaces of a metal thin plate (1) which are opposing relation to each other along the thickness thereof, while the respective states of polarizations of the first and second piezoelectric thin films (2, 3) are controlled. A pair of electrode films (5) are formed on the respective surfaces of the first and second piezoelectric thin films (2, 3) opposite to the metal thin plate (1).
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Fujii Satoru
Kamada Takeshi
Kanno Isaku
Takayama Ryoichi
Harness & Dickey & Pierce P.L.C.
Nguyen Tai Van
Tugbang A. Dexter
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