Fishing – trapping – and vermin destroying
Patent
1991-09-05
1995-05-23
Maples, John S.
Fishing, trapping, and vermin destroying
437225, 437247, 20419237, H01L 21441, H01L 21302
Patent
active
054181887
ABSTRACT:
A method for controlled positioning of a compound layer such as TiSi.sub.2 or CoSi.sub.2 in a multilayer device such as a semiconductor is disclosed. The compound surface layer is situated adjacent to an intermediate layer comprised of one of the two types of atoms present in the molecules of the adjacent compound surface layer. The intermediate layer is also situated adjacent to a base layer, such as a semiconductor substrate. An epitaxial silicon layer is the suggested intermediate layer where the surface layer is comprised of TiSi.sub.2 or CoSi.sub.2. By simultaneously heating the multilayer device and using an appropriate etching process for selectively removing the atoms from the surface of the compound surface layer which are common in both the compound and intermediate layer (i.e., silicon) the intermediate layer can be reduced in thickness and/or fully consumed while the structural integrity of the compound surface layer remains essentially unchanged. This results in positioning the surface layer directly adjacent to the base layer, thus allowing for the controlled placement of the compound layer in the multilayer device.
REFERENCES:
patent: 4248688 (1981-02-01), Gartner et al.
patent: 4608118 (1986-08-01), Curtis et al.
patent: 4692348 (1987-09-01), Rubloff et al.
patent: 4778563 (1988-10-01), Stone
patent: 4851257 (1989-07-01), Young et al.
patent: 4983547 (1991-01-01), Arima et al.
J. Fine, T. S. Andreadis and F. Davarya, Nucl. Instr. and Methods 209, 521 (1983) (no month).
M. Shikata and R. Shimizu Surf. Sci. 97, L363 (1980) (no month).
Th. Wirth, V. Atzrodt and H. Lange, phys. stat. sol. (a) 82, 459 (1984) (no month).
K. Morita, H. Ohno, M. Hayashibara and N. Itoh, Nucl. Instr. and Methods in Phys. Res. B2, 596 (1984) (no month).
Harper James M. E.
Motakef Shahrnaz
Moy Dan
International Business Machines - Corporation
Maples John S.
LandOfFree
Method for controlled positioning of a compound layer in a multi does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for controlled positioning of a compound layer in a multi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for controlled positioning of a compound layer in a multi will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2140300