Method for continuously making a semiconductor device

Details Method for continuously making a semiconductor device Method for continuously making a semiconductor device

1996-06-03

1998-05-19

Picardat, Kevin

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

438 62, 438484, 438907, H01L 2122

Patent

active

057535310

ABSTRACT:
A method of continuous manufacture of semiconductor integrated circuits, said method and apparatus adapted to contain the semiconductor substrate, semiconductor deposition coating processes, and etching processes within a substantially collocated series of process chambers so that the semiconductor travels from one chamber to the next without exposure to airborne impurities and contact with manufacturing personnel. The invention has particular utility in the high volume fabrication of large surface area semiconductor circuits such as active matrix liquid crystal displays. The present invention contains a roll-to-roll and continuous belt embodiment.

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