Method for continuous deposition by vacuum evaporation

Details Method for continuous deposition by vacuum evaporation Method for continuous deposition by vacuum evaporation

1979-05-29

1982-04-20

Hoffman, James R.

Coating processes

Electrical product produced

Photoelectric

427 75, 427251, 4272555, C23C 1302, C23C 1304

Patent

active

043259863

ABSTRACT:
An apparatus to deposit material on a substrate, such as in the making of thin film solar cells, consists of two chambers. A manifold chamber having a plurality of spaced nozzles assures efficient and uniform deposition on a substrate. The rate of depositions is controlled by an orifice in a passageway connecting the manifold chamber to an evaporation chamber.

REFERENCES:
patent: 4148275 (1979-04-01), Benden et al.
Burton et al., "Formation and Characterization of (CdZn)S Films and (CdZn)S/Cu.sub.2 S Heterojunctions", Jul. 1, 1977.

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