Electricity: measuring and testing – Plural – automatically sequential tests
Patent
1987-10-09
1989-09-19
Karlsen, Ernest F.
Electricity: measuring and testing
Plural, automatically sequential tests
324158R, 324501, 324538, G01R 3102
Patent
active
048684929
ABSTRACT:
For testing the integrity of conducting lines on or in a substrate, the following steps are executed: (I) Selected pads are irradiated by a focused optical beam so that they are positively charged due to photon-assisted tunneling of electrons from those pads. The charges propagate through existing conductors so that all selected pads and all pads connected to them assume a specific voltage. (II) The whole surface is irradiated by a flooding optical beam. Photon-assisted tunneling of electrons will now occur from those pads which were not charged previously. (III) The tunneling electrons excite an electroluminescent layer whose illumination reveals the spatial distribution of uncharged pads. This method is performed in air under atmospheric conditions and allows completely contactless testing of circuitry to detect line interruptions as well as shortcuts between separate lines. It is suited for surface lines, buried lines and for via connections.
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Beha Johannes G.
Blacha Armin U.
Clauberg Rolf
Seitz Hugo K.
International Business Machines - Corporation
Karlsen Ernest F.
Morris Daniel P.
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