Fishing – trapping – and vermin destroying
Patent
1992-09-24
1993-08-17
Quach, T. N.
Fishing, trapping, and vermin destroying
437186, 437193, 437200, 148DIG19, H01L 21283, H01L 21335
Patent
active
052368521
ABSTRACT:
An electrical contact (46) to a phosphorous doped polysilicon gate electrode (18) is formed by preventing arsenic, from a source and drain implant, from doping a portion (22) of the polysilicon gate electrode (18). A photoresist mask (20) covers a portion (22) of the polysilicon gate electrode (18) during the implant, thus preventing it from being doped. An electrical contact (46) is then formed to the masked portion (22) of the polysilicon gate electrode (18).
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Barker Jeffrey M.
Cherniawski Michael
Kaushik Vidya S.
Pyle Ronald E.
Clingan Jr. James L.
Jones Maurice (Jay)
Motorola Inc.
Quach T. N.
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