Method for constructing a photomask assembly using an...

Photocopying – Projection printing and copying cameras – Detailed holder for original

Reexamination Certificate

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Reexamination Certificate

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06894766

ABSTRACT:
A method for constructing a photomask assembly using an encoded mark is disclosed. The method includes comparing a first encoded mark located on a photomask with a second encoded mark located on a pellicle. The first encoded mark includes one or more first symbols and the second encoded mark includes one or more second symbols. The method further includes mounting the pellicle on the photomask if at least one of the symbols of the first encoded mark matches at least one of the symbols of the second encoded mark.

REFERENCES:
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patent: 5513427 (1996-05-01), Yokoyama et al.
patent: 5948572 (1999-09-01), Liu et al.
patent: 6473520 (2002-10-01), Hunatsu
patent: 6573520 (2003-06-01), Satoh et al.
patent: 403083321 (1991-04-01), None

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