Method for connecting magnetic substance target to backing...

Details Method for connecting magnetic substance target to backing... Method for connecting magnetic substance target to backing...

2002-11-14

2008-03-25

Sheehan, John P. (Department: 1793)

Metal fusion bonding

Process

With disassembling of bonded joint

C204S298120, C204S298130, C204S192200

Reexamination Certificate

active

07347353

ABSTRACT:
A method for connecting a magnetic substance target to a backing plate with less variation in plate thickness, characterized in having the steps of connecting the magnetic substance target to an aluminum plate beforehand while maintaining the flatness, connecting the magnetic substance target connected to the aluminum plate to the backing plate while maintaining the flatness, and grinding out the aluminum plate, whereby the flatness of the magnetic substance target can be maintained until the magnetic substance target is connected to the backing plate by a relatively simple operation.

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Patent Abstracts of Japan, 1 page English Abstract of JP 08-246144, Sep. 1996.
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Patent Abstracts of Japan, 1 page English Abstract of JP 05-003273, Jan. 1993.

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