Method for comparing lens distortion between two steppers

Details Method for comparing lens distortion between two steppers Method for comparing lens distortion between two steppers

1997-10-24

1998-12-01

Evans, F. L.

Optics: measuring and testing

Lens or reflective image former testing

For optical transfer function

G01B 1100

Patent

active

058446729

ABSTRACT:
The mask for checking lens distortion comprises a plurality of mother verniers formed at each portion of the quartz and a plurality of the daughter verniers spaced from each of the plurality of the mother verniers.

REFERENCES:
patent: 5402224 (1995-03-01), Hirukawa et al.
patent: 5405810 (1995-04-01), Mizumo et al.
patent: 5557855 (1996-09-01), Hwang
patent: 5615006 (1997-03-01), Hirukawa et al.

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