Metal fusion bonding – With control means responsive to sensed condition – Work-responsive
Patent
1991-11-04
1992-09-08
Heinrich, Samuel M.
Metal fusion bonding
With control means responsive to sensed condition
Work-responsive
228102, 228105, B23K 308
Patent
active
051450992
ABSTRACT:
An improved system for the production of semiconductor devices is described. The invention incorporates conventional die attach and lead bond means into a simplified, common machine system. An independently mounted, computer-controlled, television camera system observes, monitors, and controls the operational steps of the die attach-lead bond process using a close loop process. The invention serves to increase throughout and yields while reducing variation of the finished product.
REFERENCES:
patent: 5062565 (1991-11-01), Wood et al.
Farnworth Warren M.
McGill George P.
Wood Alan G.
Duffy Wayne E.
Heinrich Samuel M.
Micro)n Technology, Inc.
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