Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2006-04-25
2006-04-25
Assouad, Patrick J. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C700S121000, C340S500000
Reexamination Certificate
active
07035768
ABSTRACT:
Upon performing a remote maintenance/diagnosis of a manufacturing equipment, data deriving from the manufacturing equipment that is a subject of the remote maintenance/diagnosis, data deriving from a manufacture related equipment other than the manufacturing equipment, and data regarding a manufacturing execution are collected as data used for the remote maintenance/diagnosis. The data collected as the data used for the remote maintenance/diagnosis is transmitted to a remote center that performs the maintenance/diagnosis of the manufacturing equipment.
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Assouad Patrick J.
Crowell & Moring LLP
Tokyo Electron Limited
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