Method for coding semiconductor read only memory device

Fishing – trapping – and vermin destroying

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437 49, 437 52, H01L 21265, H01L 2700, H01L 2170

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active

056482892

ABSTRACT:
A method for coding a semiconductor ROM. The method includes the steps of: carrying out a local oxidizing process on a semiconductor substrate to separate the substrate into field regions and active regions; forming a gate insulating layer; depositing a polysilicon layer; and patterning the structure by applying a photo etching process to form a polysilicon gate only on a portion where an enhancement transistor is to be formed. Further, impurity ions are ion-implanted into a source/drain region by utilizing a gate of an enhancement transistor as a mask, and simultaneously, impurity ions are ion-implanted into a region where a drain, a gate and a source of a depletion transistor are to be formed, whereby n type impurity layers of the same depth are formed to interconnect them.

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patent: 5422296 (1995-06-01), Lage
patent: 5453392 (1995-09-01), Hong et al.

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