Method for coating the photoresist onto a belt-like material com

Details Method for coating the photoresist onto a belt-like material com Method for coating the photoresist onto a belt-like material com

1976-03-31

1977-09-27

Kendall, Ralph S.

Coating processes

With stretching or tensioning

Running lengths

29624, 29625, 118249, 156659, 427 8, 427 96, 427211, 427 58, 427278, 427358, 96 362, B05C 108

Patent

active

040512746

ABSTRACT:
A method for coating the photoresist by coating rollers onto a belt-like material comprising a perforated film carrier and a metallic foil laminated thereon. This belt-like material, which has so-called device holes or apertures punched off with a predetermined pitch and is particularly to be used for producing lead frames for IC devices, is wound around a back-up roller with its metallic foil facing outward to give a slight tension to the metallic foil. Thus, a uniform and continuous coating of the photoresist onto the foil may be obtained without any dents formed even at those device holes or apertures.

REFERENCES:
patent: 3469982 (1969-09-01), Celeste
patent: 3689991 (1972-09-01), Aird
patent: 3762365 (1973-10-01), Herzog
patent: 3820994 (1974-06-01), Lindberg et al.

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