Method for coating quartz with boron nitride

Details Method for coating quartz with boron nitride Method for coating quartz with boron nitride

1983-10-18

1985-06-11

Childs, S. L.

Coating processes

Interior of hollow article coating

Coating by vapor, gas, mist, or smoke

427 87, 427255, 4272552, 427314, 428427, B05D 722, C23C 1100

Patent

active

045228493

ABSTRACT:
A method for coating quartz with a protective boron nitride film constitutes heating the quartz member to a temperature of 900.degree. C. to 1000.degree. C. in a stream of inert gas. After heating the quartz member to the desired temperature, the flow of inert gas is discontinued, whereupon ammonia and diborane gases, mixed at a temperature of 200.degree. C. to 400.degree. C., are allowed to flow past the quartz member. The flow of mixed ammonia and diborane gases is maintained for a time sufficient to deposit a boron nitride film of desired thickness. The boron nitride is produced by chemical reaction between ammonia and diborane.

REFERENCES:
patent: 3540926 (1970-11-01), Rairden
patent: 3692566 (1972-09-01), Branovich et al.
patent: 3734817 (1973-05-01), Bienert et al.
patent: 3746569 (1973-07-01), Pammer et al.
patent: 4297387 (1981-10-01), Beale
Shohno et al., Proceedings of the Seventh International Conference on Chemical Vapor Deposition, p. 234, 1979.

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