Method for coating internal surface of plasma processing...

Details Method for coating internal surface of plasma processing... Method for coating internal surface of plasma processing...

2005-04-05

2005-04-05

Bareford, Katherine (Department: 1762)

Coating processes

Spray coating utilizing flame or plasma heat

Metal oxide containing coating

C427S453000

Reexamination Certificate

active

06875477

ABSTRACT:
The present invention comprises an aluminum base material2constituting the plasma processing chamber of the plasma processing apparatus, a bonding layer3deposited on the base material consisting of a transition metal or transition metal alloy that modifies the difference in thermal expansion coefficient of the base material and the material constituting a plasma contact surface, and the plasma contact surface1formed of a material selected from a group consisting of La2O3, LaAlO3, MgLaAl11O19, and a mixture of La2O3and Al2O3being a metal oxide including at least La and O deposited on the bonding layer3via a thermal spray process.

REFERENCES:
patent: 6261643 (2001-07-01), Hasz et al.
patent: 20020018902 (2002-02-01), Tsukatani et al.
patent: 20020177001 (2002-11-01), Harada et al.
patent: 2001-164354 (2001-06-01), None
patent: 2001-179080 (2001-07-01), None

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