Method for coating internal member having holes in vacuum...

Details Method for coating internal member having holes in vacuum... Method for coating internal member having holes in vacuum...

2003-09-17

2009-10-20

Bareford, Katherine A (Department: 1792)

Coating processes

Spray coating utilizing flame or plasma heat

Nonuniform or patterned coating

C427S453000, C427S454000, C427S446000, C427S455000

Reexamination Certificate

active

07604845

ABSTRACT:
A method of forming a coating film of ceramic material on a surface of an internal member disposed in a vacuum processing apparatus, the surface of the internal member having holes formed therein. The method involves: (A) filling the holes of the internal member with padding plugs, each of which has a core member made from a metal material and a metal-resin composite layer covering the circumferential surface of the core member, the metal-resin composite layer being a complex composed of a metal material and a resinous material exhibiting nonconjugative property to a coating film; (B) forming a ceramic coating film on the surface of the internal member by plasma spraying after step (A); and (C) extracting the padding plugs out of the holes after step (B).

REFERENCES:
patent: 4115507 (1978-09-01), Pico et al.
patent: 5634266 (1997-06-01), Sherstinsky et al.
patent: 2003/0007308 (2003-01-01), Harada et al.
patent: 2003/0154919 (2003-08-01), Rice et al.
patent: 05-278038 (1993-10-01), None
patent: 7-335732 (1995-12-01), None
patent: 01/54188 (2001-07-01), None
Mar. 2008 translation of Japan 05-278038, which was published Oct. 26, 1993.
Mar. 2008 translation of WO 01/054188, which was published Jul. 26, 2001.

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