Method for coating cryopumping apparatus

Details Method for coating cryopumping apparatus Method for coating cryopumping apparatus

1979-01-12

1980-08-26

Hoffman, James R.

Coating processes

Coating has x-ray, ultraviolet, or infrared properties

427401, F17C 702

Patent

active

042195888

ABSTRACT:
Cryopumping speed of nitrogen, helium, hydrogen and neon can be increased by omitting the chevron baffle in a conventional cryopump and preventing incident radiation of about 300.degree. K. from striking surfaces used to cryosorb helium, hydrogen and neon. An apparatus is disclosed utilizing three pumping surfaces created from open ended opposed nested cylinders. A radiation absorbent coating is placed on one of the surfaces to shield the helium, hydrogen and neon pumping surface. Refrigeration can be provided by a two-stage closed cycle cryogenic refrigerator.

REFERENCES:
patent: 3168819 (1965-02-01), Santeler
patent: 3338063 (1967-08-01), Hogan et al.
patent: 3390536 (1968-07-01), Kreisman
patent: 3485054 (1973-12-01), Hogan
patent: 3579998 (1971-05-01), Thibault et al.
patent: 3585807 (1971-06-01), Hengevoss et al.
Turner et al., Small Cryopump with Integral Refrigerator, The Journal of Vacuum Science and Technology, vol. 3, No. 5, 1966, pp. 252-257.
Gareis et al., Cryosorption Pumping of Helium and Hydrogen Cryogenic Engineering News, Oct. 1967, pp. 26-30.
Visser et al., A Versatile Cryopump for Industrial Vacuum Systems Pergamon Press Ltd., 1976.

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