Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1995-12-19
1997-04-15
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
427299, 4273981, C23C 1626, C23C 1644
Patent
active
056207450
ABSTRACT:
A method for depositing synthetic diamond film on a substrate, including the following steps: pre-stressing the substrate to obtain a pre-deposition stress across a surface thereof; depositing the diamond film on the pre-stressed substrate surface; and cooling the film and substrate, and relieving the pre-deposition stress during the cooling. When the substrate has a higher coefficient of thermal expansion than the diamond film, the pre-stress is a compressional stress. When the substrate has a lower coefficient of thermal expansion than diamond film, the pre-stress is a tensile stress.
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Abstract (Dialog) From Diamond Film Update of Jun. 16, 1994--"CVD Diamond Film Without Stress Cracks" (1 sheet).
King Roy V.
Novack Martin M.
Saint Gobain/Norton Industrial Ceramics Corp.
Ulbrich Volker R.
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