Method for coating a substrate

Details Method for coating a substrate Method for coating a substrate

1975-03-03

1977-03-22

Mack, John H.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204164, 204165, 204170, 204298, 250531, 427 41, C23C 1500

Patent

active

040135322

ABSTRACT:
A method and apparatus for coating a substrate with a layer of polymerized material by simultaneous glow discharge polymerization and sputtering is disclosed. A substrate and two electrodes are placed in a chamber which can be evacuated. An appropriate pressure of a gas which can form a polymer is introduced into the chamber. A glow discharge is established in the gas. Molecules of starting gas and reactive species created in the glow discharge deposit on the electrodes and on the substrate. Material deposited on at least one of the electrodes is sputtered onto the substrate by applying an electric potential, preferably an AC potential, across the electrodes. The glow discharge is preferably confined to a region adjacent to the sputtered electrode. This confinement may be accomplished by the use of a planar magnetron sputtering cathode. The method and apparatus disclosed allow the rapid deposition of high quality polymeric coatings at low gas pressures.

REFERENCES:
patent: 3297465 (1967-01-01), Connell et al.
patent: 3464907 (1969-09-01), Froemel et al.
patent: 3471316 (1969-10-01), Manuel
patent: 3475307 (1969-10-01), Knox et al.
patent: 3666533 (1972-05-01), Lee
patent: 3878085 (1975-04-01), Corbani

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