Method for cleaning surfaces using UV lasers

Details Method for cleaning surfaces using UV lasers Method for cleaning surfaces using UV lasers

1989-09-15

1992-09-29

Kunemund, Robert

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

437173, 437939, 437946, 148DIG17, H01L 21268, B08B 700

Patent

active

051511355

ABSTRACT:
The invention relates to a new method for cleaning chemical, metallic and particulate contaminants from solid surfaces. The new method comprises irradiating the surface with essentially ultraviolet laser radiation whose parameters are selected to avoid causing substantial chemical or physical change at the surface.

REFERENCES:
patent: 4292093 (1981-09-01), Ownby
patent: 4568632 (1986-02-01), Blum et al.
patent: 4733944 (1988-03-01), Fahlen
patent: 5024968 (1991-06-01), Engelsberg
"Atomically clean semiconductor surfaces prepared by laser irradiation", McKinley et al., J. Phys. D: Appl. Phys., 13(1980), pp. L193-L197.
"Atomically clean surfaces by Pulsed Laser Bombardment", S. M. Bedair and P. Smith, Journal of Applied Physics, vol. 10, No. 12, Nov. 1969.

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