Method for cleaning objects using a fluid charge

Details Method for cleaning objects using a fluid charge Method for cleaning objects using a fluid charge

1998-10-26

2000-04-04

Coe, Philip R.

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

134 10, 134 11, 134 254, 134 255, 134 26, 134 30, 134 34, 134 36, 134 951, 134 952, 134902, B08B 304

Patent

active

060456213

ABSTRACT:
A method for cleaning an object. The method (400) includes immersing (420) an object in a liquid comprising water, which can be ultra-clean. The object has a front face, a back face, and an edge. The method includes providing (450) a cleaning enhancement substance (e.g., trace amount of polar organic compound, surfactant, ammonia bearing compound) into the liquid. In one embodiment, the cleaning enhancement substance can form a liquid film, such as a monolayer overlying an upper surface or level of the liquid. The method also includes providing a substantially particle free environment (e.g., ultra-clean gas, ultra-clean non-reactive gas) adjacent to the front face and the back face of the object as the liquid including the cleaning enhancement substance is being removed.

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