Method for cleaning bonding chamber of bonding machine

Details Method for cleaning bonding chamber of bonding machine Method for cleaning bonding chamber of bonding machine

2005-02-01

2005-02-01

Williams, Joseph (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

C349S189000, C349S190000

Reexamination Certificate

active

06848963

ABSTRACT:
A method of cleaning a liquid crystal display bonding chamber includes loading a first substrate and a second substrate in the bonding chamber, bonding the first substrate and the second substrate to produce bonded substrates, unloading the bonded substrates, repeating the loading, the bonding and the unloading for K times, where K is an integer greater than zero, and cleaning the bonding chamber.

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