Method for cleaning a manufacturing apparatus and a...

Details Method for cleaning a manufacturing apparatus and a... Method for cleaning a manufacturing apparatus and a...

2006-10-17

2006-10-17

Kornakov, M. (Department: 1746)

Cleaning and liquid contact with solids

Processes

Hollow work, internal surface treatment

C134S022100, C134S022190, C134S034000, C134S902000, C438S905000

Reexamination Certificate

active

07121286

ABSTRACT:
A method for cleaning a manufacturing apparatus, includes introducing a cleaning gas including fluorine so as to flow from upstream toward an outlet port in a reaction chamber; and flowing a protective gas which reacts with the fluorine from a vicinity of the outlet port of the reaction chamber as an introduction position.

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