Method for classifying a substrate

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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Details

C700S110000, C438S014000, C702S082000

Reexamination Certificate

active

06882896

ABSTRACT:
A method for classifying a substrate first provides the substrate and its corresponding inspection map. Then, a database having a plurality of specification data is provided. After that, the inspection map is compared with each of the specification data so as to find the specification data coinciding with the inspection map. Finally, the substrate is defined according to the layout of active areas coinciding with the inspection map, and then the substrate is classified and stored.

REFERENCES:
patent: 6011619 (2000-01-01), Steffan et al.
patent: 6096093 (2000-08-01), Caywood et al.
patent: 6272393 (2001-08-01), Steffan et al.
patent: 6466895 (2002-10-01), Harvey et al.
patent: 6674889 (2004-01-01), Takayama
patent: 6792366 (2004-09-01), Hosoya et al.
patent: 6792367 (2004-09-01), Hosoya et al.
patent: 2001-067479 (2001-03-01), None

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