Method for clarifying exhaust gas

Details Method for clarifying exhaust gas Method for clarifying exhaust gas

2007-11-27

2007-11-27

Vanoy, Timothy C. (Department: 1754)

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

C423S239100, C423S245100, C423S245300

Reexamination Certificate

active

10516826

ABSTRACT:
A cleaning process of exhaust gas which includes the steps of bringing the exhaust gas containing at least one of nitrogen oxides or organic solvent into contact with a cleaning agent including metal as a reductive cleaning agent component and metal oxide as an oxidative cleaning agent component or including lower valent metal oxide as a reductive cleaning agent component and higher valent metal oxide as an oxidative cleaning agent component while heating them. A cleaning process of exhaust gas containing nitrogen oxides and/or organic solvent with high and varying concentration discharged from a manufacturing process of semiconductor capable of easily cleaning at relatively low temperature and with high decomposition factor without using large-scale cleaning apparatus or a complicated structural cleaning apparatus is provided.

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