Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1993-10-05
1995-01-03
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
4272551, 427255, 4272555, 4272481, 427314, C23C 1600
Patent
active
053785010
ABSTRACT:
Titianium nitride film is deposited upon a semi-conductor substrate by chemical vapor deposition of titanium tetrachloride, ammonia and a diluent at temperatures less than 550.degree. C. This is accomplished by minimizing the boundary layer thickness over the substrate.
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Foster Robert F.
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