Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2006-11-21
2009-02-03
Chen, Bret (Department: 1792)
Coating processes
Coating by vapor, gas, or smoke
C427S255230, C118S715000
Reexamination Certificate
active
07485339
ABSTRACT:
A method for chemical vapor deposition (CVD) comprises injecting a purge gas into a reaction chamber where substrates are located; and supplying a source material of vapor phase participating directly in forming a film on the substrates to an inside of the reaction chamber, thus forming a protective curtain in the inside of the reaction chamber by a mutual diffusion-suppressing action between the purge gas and source material.
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Chen Bret
Volpe and Koenig P.C.
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