Method for chemical vapor deposition

Coating processes – Electrical product produced – Condenser or capacitor

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148 63, 148 635, 427 91, 427 94, 427 95, 427109, 427124, 4271262, 4271263, 4271264, 4271266, 427164, 427166, 427167, 427250, 427252, 427253, 427255, 4272551, 4272552, 4272553, B05D 512, B05D 100, C03C 1700, C23C 1304

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043105670

ABSTRACT:
A gas containing a film forming component is shot through a shooting means in the form of a high speed stream of gas. The gas stream is shot toward the surface of a heated base where a film is to be deposited. The stream is directed at an inclination relative to the base surface. As the stream approaches the base surface it is subjected to the action of a high speed sucking stream of air produced by a sucking means. The sucking means causes the gas stream to flow in a V-shaped path with the upper ends of the V located at the shooting means and the sucking means, with the vertex of the V located therebetween. The film coating is placed on the surface of the base by allowing the base surface to contact the V-shaped path of the stream at the vertex of the path.

REFERENCES:
patent: 3148084 (1964-09-01), Hill
patent: 3681042 (1972-08-01), Edwards
patent: 3819404 (1974-06-01), Scholes
patent: 3841858 (1974-10-01), Akashi
patent: 3925050 (1975-12-01), Kushihashi
patent: 3934063 (1976-01-01), Dubble
patent: 4123244 (1978-10-01), Leclercq
patent: 4125391 (1978-11-01), Van Laethem
Tabata et al., "Chemical Vapor Deposition by a Reflecting Gas Stream", International Conference on Solid Films and Surfaces, Collected Abstracts, Jul. 5-8, 1978, p. 1340.

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