Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1977-03-21
1978-04-04
Kaplan, Morris
Coating processes
Coating by vapor, gas, or smoke
Metal coating
427 86, B05D 512
Patent
active
040828654
ABSTRACT:
An apparatus for chemically vapor-depositing a material onto surfaces of a plurality of substrates within a reaction chamber comprises means positioned within the chamber for supporting the substrates in a stack-like relationship wherein the surfaces are substantially parallel to each other and are separated by spacings, and a plurality of gas nozzles connected to a source of gas and positioned within the chamber so that the flow of gas therefrom is directed, respectively, into the spacings between the surfaces. A method of utilizing this apparatus comprises rotating the substrates while moving the nozzles back and forth in an arc, so that the flow of gas therefrom is directed into the spacings at different angles. Uniform deposition of the material onto the substrates is further improved by maintaining the pressure of the gas within the chamber between about 1 and 100 Torr.
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IBM Technical Disclosure Bulletin, "Emitter Diffusion System", Eshbach et al., vol. 13, No. 6, [Nov. 1970], p. 1459.
Ban Vladimir Sinisa
Gilbert Stephen Lee
Christoffersen H.
Kaplan Morris
Magee T. H.
RCA Corporation
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