Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-01-17
2010-02-23
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S067000, C355S077000, C216S058000, C216S076000
Reexamination Certificate
active
07667820
ABSTRACT:
An amount of oxides in an apparatus having a chamber containing an amount of contamination material and an amount of the oxides, the oxides being oxides of the contamination material, is reduced. In the method, a hydrogen containing gas is provided in at least part of the chamber. A predetermined minimum partial hydrogen gas pressure and a predetermined maximum partial oxidants pressure is established in the chamber. In the chamber, a temperature is maintained which is at least higher than a temperature at which, in thermodynamic equilibrium given the predetermined maximum partial oxidants and minimum partial hydrogen gas pressures as established, the amount of contamination material is at least 10 times higher than the amount of oxides.
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patent: 2004/0165160 (2004-08-01), Van Beek et al.
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patent: 1 643 310 (2006-04-01), None
Silberberg, Martin S., Chemistry:the molecular nature of matter and change, 2003, McGraw-Hill, 3rded., pp. 736-741.
International Search Report issued for PCT Patent Application No. PCT/NL2007/050018, dated Jul. 18, 2007.
ASML Netherlands B.V.
Glick Edward J
Pillsbury Winthrop Shaw & Pittman LLP
Whitesell-Gordon Steven H
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