Method for chemical coating on opposite surfaces of workpieces

Details Method for chemical coating on opposite surfaces of workpieces Method for chemical coating on opposite surfaces of workpieces

1992-07-27

1993-07-13

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Polymerization of coating utilizing direct application of...

427162, 427294, 427509, 427522, 427562, 427569, 427587, 427591, 427598, B05D 306

Patent

active

052272028

ABSTRACT:
In a plasma-enhanced chemical vapor deposition method, in order to achieve greater space for positioning workpieces to be coated simultaneously and essentially identically on all sides, the workpiece are positioned at a distance from one electrode on the basis of a coating rate gradient.

REFERENCES:
patent: 4289598 (1981-09-01), Engle
patent: 4512284 (1985-04-01), Robinson et al.
patent: 4971667 (1990-11-01), Yamazaki et al.
T. Wydeven, et al., "Antireflection coating prepared by plasma polymerization of perfluorobutene-2", Appliec Optics, vol. 15, No. 1, Jan. 1976.
E. Ritter, "Optical film materials and their applications", Applied Optics, vol. 15, No. 10, Oct. 1976.

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