Measuring and testing – With fluid pressure – Porosity or permeability
Reexamination Certificate
2005-06-28
2008-09-09
Williams, Hezron E. (Department: 2856)
Measuring and testing
With fluid pressure
Porosity or permeability
C073S866000, C702S043000, C702S082000
Reexamination Certificate
active
07421885
ABSTRACT:
A method and apparatus for determining pore size distribution and/or the presence of at least one killer pore in at least a portion of a porous film deposited upon a substrate are disclosed herein. In one embodiment, there is provided a method for determining pore size distribution comprising: providing the substrate having the film deposited thereupon wherein the film comprises pores and wherein the pores have a first volume; exposing the film to an adsorbate at a temperature and a pressure sufficient to provide condensation of the adsorbate in pores and wherein the pores after the exposing step have a second volume; and measuring the difference between the first and the second volume using a volumetric technique; and calculating the pore size and pore volume using the change in the first and the second volume, the pressure, and a model that relates pressure to pore diameter.
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Coe Charles Gardner
Kimak Michael Francis
Kirner John Francis
Kitzhoffer Ronald Joseph
MacDougall James Edward
Air Products and Chemicals Inc.
Morris-Oskanian Rosaleen P.
Shah Samir M.
Williams Hezron E.
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