Method for characterizing or controlling the production of a...

Details Method for characterizing or controlling the production of a... Method for characterizing or controlling the production of a...

2006-05-16

2006-05-16

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S632000

Reexamination Certificate

active

07046379

ABSTRACT:
A method for characterizing or controlling the production of a thin-layered component using optical methods. Acquired signals S1and S2are processed in order to obtain parameters x, ∈ of the deposited layers. The stacking is represented by the product of two Abeles matrices for each direction of polarization s (perpendicular to the incidence plane) and p (parallel to the incidence plane): a known matrix Mos,prepresenting the support and matrix dMs,prepresenting a thin transparent layer being deposited. The signal variations measured, dS1and dS2, are inverted to obtain thickness x and dielectric constant ∈ of the thin layer by the following operations: Taylor expansion as a function of variation dx of thickness x of the thin layer of the coefficients of matrix dM; the coefficients of matrix Ms,pare calculated each in the form A(∈±2)dx2+B(∈±1)dx+C and the relation S1,2=A1,2(∈±2) dx2+B1,2(∈±1) dx+C1,2is thereby deduced which connects signals S1and S2to parameters ∈ and dx; dx is eliminated and a master function P(∈±4)=0 is thereby deduced; the equation is solved and the solutions are selected corresponding to values that are physically plausible in order to measure ∈ and use the ∈ value obtained to determine dx.

REFERENCES:
patent: 5900633 (1999-05-01), Solomon et al.

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