Method for catalytic growth of nanotubes or nanofibers...

Details Method for catalytic growth of nanotubes or nanofibers... Method for catalytic growth of nanotubes or nanofibers...

2002-12-03

2009-02-17

Kunemund, Robert M (Department: 1792)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Forming from vapor or gaseous state

With decomposition of a precursor

C117S095000, C117S096000, C117S089000, C117S105000

Reexamination Certificate

active

07491269

ABSTRACT:
The invention relates to a process for the growth of nanotubes or nanofibers on a substrate comprising at least an upper layer made of a first material, wherein: the formation, on the surface of the upper layer, of a barrier layer made of an alloy of the first material and of a second material, said alloy being stable at a first temperature; the formation of spots of catalyst that are made of the second material, on the surface of the alloy layer; and the growth of nanotubes or nanofibers at a second temperature below said first temperature. The alloy layer allows effective growth of nanotubes
anofibers from catalyst spots on the surface of said alloy layer. This is because the alloy layer constitutes a diffusion barrier preventing the catalyst from diffusing into the growth substrate, which barrier is stable at the catalytic nanotube
anofiber growth temperature.

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Biro L P et al: “Selective nucleation and growth of carbon nanotubes at the CoSi/sub 2//Si interface” Applied Physics Letters, Feb. 7, 2000.
Selective nucleation and growth of carbon nanotubes at the CoSi2/Si interface Applied Physics Letter, Feb. 7, 2000.

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