Method for carrying out a double or multiple exposure

Details Method for carrying out a double or multiple exposure Method for carrying out a double or multiple exposure

2007-12-18

2007-12-18

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S046000, C355S075000, C355S077000, C430S394000

Reexamination Certificate

active

10948570

ABSTRACT:
The mutually associated structure patterns, which are provided on one mask, or a plurality of masks for a double or multiple exposure can be received by the mask substrate holder. The mask substrate holder has two receiving stations one for each of the masks. Alternatively, both structure patterns for the double exposure are formed on one mask. The substrate holder has one receiving station. The substrate holder, is displaced from the section including first structure pattern to the second, between the two exposure operations, without the masks having to be loaded or unloaded, and realigned.

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