Method for capacitance measurement in silicon

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

Reexamination Certificate

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Reexamination Certificate

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07129696

ABSTRACT:
A method for testing a partially fabricated wafer is provided that comprises the following steps: providing a plurality of selectable devices under test (DUT) overlying a substrate of the wafer; biasing a second structure located in proximity to the DUT to have a first electrical state such that a first equivalent test structure is formed; determining a first parasitic parameter associated with the first equivalent test structure by applying a signal to the DUT while the second structure is in the first electrical state and measuring a response that is indicative of the first parameter; biasing the second structure to have a second electrical state such that a second equivalent test structure is formed; and determining a second parasitic parameter associated with the second equivalent test structure by applying a signal to the DUT while the second structure is in the second electrical state and measuring a response that is indicative of the second parameter.

REFERENCES:
patent: 5130645 (1992-07-01), Levy
patent: 5212454 (1993-05-01), Proebsting
patent: 6166607 (2000-12-01), Schoellkopf
patent: 6509796 (2003-01-01), Nguyen et al.
patent: 6684065 (2004-01-01), Bult et al.
patent: 6700399 (2004-03-01), Savithri
patent: 6803829 (2004-10-01), Duncan et al.
patent: 6872583 (2005-03-01), Wu
patent: 6972625 (2005-12-01), Nguyen et al.
patent: 7109738 (2006-09-01), Savithri
patent: 2003/0128071 (2003-07-01), Nguyen et al.

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