Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2006-10-31
2006-10-31
Hollington, Jermele (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
Reexamination Certificate
active
07129696
ABSTRACT:
A method for testing a partially fabricated wafer is provided that comprises the following steps: providing a plurality of selectable devices under test (DUT) overlying a substrate of the wafer; biasing a second structure located in proximity to the DUT to have a first electrical state such that a first equivalent test structure is formed; determining a first parasitic parameter associated with the first equivalent test structure by applying a signal to the DUT while the second structure is in the first electrical state and measuring a response that is indicative of the first parameter; biasing the second structure to have a second electrical state such that a second equivalent test structure is formed; and determining a second parasitic parameter associated with the second equivalent test structure by applying a signal to the DUT while the second structure is in the second electrical state and measuring a response that is indicative of the second parameter.
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Brady W. James
Marshall, Jr. Robert D.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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