Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-11-03
2008-07-29
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07405833
ABSTRACT:
Apparatus and methods for generating an empirically determined mathematical model of wavefront error in an interferometer as a function of aperture misalignment and then applying the model to correct subsequent measurements. The methods are useful in Fizeau and other types of interferometers in which carrier fringe analysis may be used for reducing errors caused by environmental and vibration effects.
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Battistoni Donald S.
Smythe Robert A.
Caufield Francis J.
Connolly Patrick
Richey Scott M
Zygo Corporation
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