Method for calibrating accelerometer sensitivity

Details Method for calibrating accelerometer sensitivity Method for calibrating accelerometer sensitivity

2006-08-22

2006-08-22

Raevis, Robert (Department: 2856)

Measuring and testing

Instrument proving or calibrating

Speed, velocity, or acceleration

Reexamination Certificate

active

07093478

ABSTRACT:
A method for calibrating the sensitivity of a micromachined differential-capacitor accelerometer without applying mechanical stimulation, such as shaking. The accelerometer is fabricated with dimensional control structures so that a dimensional relationship is set-up among operational features of the device. The method includes measuring the resonant frequency of a movable mass and measuring the change in the output signal of the accelerometer as the mass is displaced by electrostatic means. The sensitivity of the accelerometer is then calculated.

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Benoit Charlot et al; Electrically Induced Stimuli For MEMS Self-Test; VLSI Test Symposium 2001.

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