Optics: measuring and testing – Standard
Patent
1996-08-16
1997-10-14
Font, Frank G.
Optics: measuring and testing
Standard
2502521, G01J 102
Patent
active
056777655
ABSTRACT:
A method for calibrating topographic instruments, operating at sub-micrometer resolution levels, includes providing a calibration standard having a known one-dimensional power spectral density function. A roughness is calculated from the known one dimensional power spectral density function in relation to an atomic scale topographic dimension, .increment.z.sub.i. The roughness of the calibration standard is measured by detecting light scattering therefrom and computing an isotropic power spectral density curve over the effective spatial bandwidth of the topographic instrument being calibrated. The measured roughness is then compared against the calculated roughness to determine whether the two values of roughness coincide.
REFERENCES:
patent: 4386850 (1983-06-01), Leahy
patent: 4597665 (1986-07-01), Galbraith et al.
patent: 4615762 (1986-10-01), Jastrzebski et al.
patent: 5169488 (1992-12-01), Giuffre et al.
patent: 5198869 (1993-03-01), Monteverde et al.
patent: 5332470 (1994-07-01), Crotti
patent: 5383018 (1995-01-01), Sadjadi
patent: 5520769 (1996-05-01), Barrett et al.
M.L. Hitchman et al., "Calibration standards for surface profile monitors", J. Phys. E: Sci. Instrum., vol. 13 (1), pp. 19-20 (1980).
T. Ohmi et al., "Calibration of height in atomic force microscope images with subnanometer scale silicon dioxide steps", Appl. Phys. Lett., vol. 61 (20), pp. 2479-2481 (1992).
G. A. Candela et al., "Film thickness and refractive index Standard Reference Material calibration by ellipsometry and prolifometry", SPIE vol. 661 Optical Testing and Metrology, pp. 402-407 (1986).
Bullis W. Murray
Greed, Jr. James J.
Laird Ellen R.
Scheer Bradley W.
Font Frank G.
Merlino Amanda
Schneck Thomas
VLSI Standards, Inc.
Yee George B.F.
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