Method for calibrating a metrology tool and a system

Details Method for calibrating a metrology tool and a system Method for calibrating a metrology tool and a system

2008-01-08

2008-01-08

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Standard

C250S492200

Reexamination Certificate

active

07317523

ABSTRACT:
A method for calibrating a metrology tool, the method includes: determining a relationship between an upper portion of a milled reference structural element and between a lower portion of the milled reference structural element; and defining a calibration parameter in response to the relationship. A metrology system that includes: a miller adapted to mill a reference structural element; and a measurement device adapted to determine a relationship between an upper portion of a milled reference structural element and between a lower portion of the milled reference structural element; wherein the metrology system is further adapted to define a calibration parameter in response to the relationship.

REFERENCES:
patent: 6670610 (2003-12-01), Shemesh et al.
patent: 2005/0237542 (2005-10-01), Rotsch

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