Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2011-03-15
2011-03-15
Dang, Phuc T (Department: 2892)
Semiconductor device manufacturing: process
With measuring or testing
C438S016000, C257S100000
Reexamination Certificate
active
07906350
ABSTRACT:
A method and apparatus for calibrating a metrology tool are disclosed. The apparatus includes a substrate having at least one calibration site formed thereon. The calibration site includes a pattern of cells that have at least one feature disposed in a surface of the substrate. The feature provided for measurement by a step height metrology tool and a phase metrology tool to calibrate the step height and phase metrology tools.
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Baker & Botts L.L.P.
Dang Phuc T
Toppan Photomasks, Inc.
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