Method for calibrating a measuring instrument

Image analysis – Image sensing

Reexamination Certificate

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Reexamination Certificate

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10473413

ABSTRACT:
Calibration of measuring instruments resides in measuring external references which themselves have been measured with other devices and contain positioning errors. A method/system/apparatus is disclosed for calibration of a measuring instrument using at least two partial systems, one having structural elements that can be imaged on a detecting component to calibrate the instrument without the use of external references.

REFERENCES:
patent: 7027642 (2006-04-01), Rubbert et al.
patent: 7058213 (2006-06-01), Rubbert et al.
patent: 7068825 (2006-06-01), Rubbert et al.
patent: 658514 (1986-11-01), None
patent: 4331151 (1995-03-01), None
patent: 19911822 (2000-08-01), None

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