Batteries: thermoelectric and photoelectric – Thermoelectric – Thermopile
Patent
1989-08-08
1993-06-01
Walsh, Donald P.
Batteries: thermoelectric and photoelectric
Thermoelectric
Thermopile
136200, 136230, H01L 3528
Patent
active
052155978
ABSTRACT:
A method is provided for adhering a thin film metal thermocouple to a ceramic substrate used in an environment up to 700 degrees Centigrade, such as at a cylinder of an internal combustion engine. The method includes the steps of: depositing a thin layer of a reactive metal on a clean ceramic substrate; and depositing thin layers of platinum and a platinum-10% rhodium alloy forming the respective legs of the thermocouple on the reactive metal layer. The reactive metal layer serves as a bond coat between the thin noble metal thermocouple layers and the ceramic substrate. The thin layers of noble metal are in the range of 1-4 micrometers thick. Preferably, the ceramic substrate is selected from the group consisting of alumina and partially stabilized zirconia. Preferably, the thin layer of reactive metal is in the range of 0.015-0.030 micrometers (15-30 nanometers) thick. The preferred reactive metal is chromium. Other reactive metals may be titanium or zirconium. The thin layer of reactive metal may be deposited by sputtering in ultra high purity argon in a vacuum of approximately 2 milliTorr (0.3 Pascals).
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Caress Virginia B.
Carroll Chrisman D.
Costant Richard E.
Moser William R.
The United States of America as represented by the United States
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